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Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics
Bibliographic Information
- Title
- Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics
- Author
- J.Bryner
- Published
- 2006
- Resource Type
- journal article
Journal
-
- Ultrasonics (In press)
-
Ultrasonics (In press) 2006
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Details 詳細情報について
-
- CRID
- 1010000781605347716
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
