The Design and Fabrication of a MEMSX-ray Optics using An isotropic Wet Etching of Si wafers
書誌事項
- タイトル
- The Design and Fabrication of a MEMSX-ray Optics using An isotropic Wet Etching of Si wafers
- 著者
- Koshiishi, Ezoe, et al.
収録刊行物
-
- Proceedings of Optical MEMS
-
Proceedings of Optical MEMS 84-, 2006
