著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Integrated Conical Spring Linear Actuators for Tilting-Mirror Applications,31st International Conference on Micro- and Nano-Engineering 2005 Abstracts,,,2005,,,,https://cir.nii.ac.jp/crid/1010000781621005184,