[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Comprehensive Study of Low Temperature (<1000℃) Oxidation Process in SiGe/SOI Structures

Bibliographic Information

Title
Comprehensive Study of Low Temperature (<1000℃) Oxidation Process in SiGe/SOI Structures
Author
M. Tanaka, et al.

Journal

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Details

  • CRID
    1010000781684247683
  • Article Type
    journal article
  • Data Source
    • KAKEN

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