Comprehensive Study of Low Temperature (<1000℃) Oxidation Process in SiGe/SOI Structures
書誌事項
- タイトル
- Comprehensive Study of Low Temperature (<1000℃) Oxidation Process in SiGe/SOI Structures
- 著者
- M. Tanaka, et al.
収録刊行物
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- Thin Solid Films 517
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Thin Solid Films 517 245-247, 2008