Comprehensive Study of Low Temperature (<1000℃) Oxidation Process in SiGe/SOI Structures
Bibliographic Information
- Title
- Comprehensive Study of Low Temperature (<1000℃) Oxidation Process in SiGe/SOI Structures
- Author
- M. Tanaka, et al.
Journal
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- Thin Solid Films 517
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Thin Solid Films 517 245-247, 2008
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Details
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- CRID
- 1010000781684247683
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- Article Type
- journal article
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- Data Source
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- KAKEN