著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Flow Condition in Resist Spray and Patterning Performance for Three-Dimensional Photolithographyover Deep Structures,Japanese Journal of Applied Physics 43,,,2004,,,2387-2391,https://cir.nii.ac.jp/crid/1010000781775975573,