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Characterization of MEMS materials : Micro-nano physics underlying MEMS
Bibliographic Information
- Title
- Characterization of MEMS materials : Micro-nano physics underlying MEMS
- Author
- K.Sato, M.Shikida, T.Ando
Journal
-
- Tech.Dig.JSME ISMME 2003, Tsuchiura
-
Tech.Dig.JSME ISMME 2003, Tsuchiura 446-454,
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Details 詳細情報について
-
- CRID
- 1010000781776670593
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN