[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Surface Modification of TiN Films by Nitrogen Ion Beam Irradiation in Ethylene Gas Atmosphere

Bibliographic Information

Title
Surface Modification of TiN Films by Nitrogen Ion Beam Irradiation in Ethylene Gas Atmosphere
Author
I.Takano et al.

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Details

  • CRID
    1010000781776681755
  • Article Type
    journal article
  • Data Source
    • KAKEN

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