著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Surface Modification of TiN Films by Nitrogen Ion Beam Irradiation in Ethylene Gas Atmosphere,Vacuum Vol.74,,,2004,,,659-663,https://cir.nii.ac.jp/crid/1010000781776681755,