Surface Modification of TiN Films by Nitrogen Ion Beam Irradiation in Ethylene Gas Atmosphere
書誌事項
- タイトル
- Surface Modification of TiN Films by Nitrogen Ion Beam Irradiation in Ethylene Gas Atmosphere
- 著者
- I.Takano et al.
収録刊行物
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- Vacuum Vol.74
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Vacuum Vol.74 659-663, 2004