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Ultrathin Polymer Langmuir-Blodgett Films for Microlithography
Bibliographic Information
- Title
- Ultrathin Polymer Langmuir-Blodgett Films for Microlithography
- Author
- Tiesheng Li et al.
Journal
-
- Thin Solid Films 446
-
Thin Solid Films 446 138-142, 2004
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Details 詳細情報について
-
- CRID
- 1010000781776974345
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN