Young's Modulus Measurement of Nanopillars for Various Materials Fabrication by Focused-Ion-Beam Chemial-Vapor-Deposition

Bibliographic Information

Title
Young's Modulus Measurement of Nanopillars for Various Materials Fabrication by Focused-Ion-Beam Chemial-Vapor-Deposition
Author
J.Igaki, S.Matsui et al.

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Details 詳細情報について

  • CRID
    1010000781779448201
  • Article Type
    journal article
  • Data Source
    • KAKEN

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