Young's Modulus Measurement of Nanopillars for Various Materials Fabrication by Focused-Ion-Beam Chemial-Vapor-Deposition
Bibliographic Information
- Title
- Young's Modulus Measurement of Nanopillars for Various Materials Fabrication by Focused-Ion-Beam Chemial-Vapor-Deposition
- Author
- J.Igaki, S.Matsui et al.
Journal
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- The Institute of Electrical Engineers Conferense data MSS-05-1
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The Institute of Electrical Engineers Conferense data MSS-05-1 1-4, 2005
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Details 詳細情報について
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- CRID
- 1010000781779448201
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- Article Type
- journal article
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- Data Source
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- KAKEN