著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Developmento of Ultraprecision Positioning Device with 5nm Resolution,Measurement of Science and Technology (IOP) 16(to be published),,,2005,,,,https://cir.nii.ac.jp/crid/1010000781779540736,