著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors,Abs.of 31^<st> Internat.Conf.on Micro-Nano-Engineering No.11 B_03,,,2005,,,,https://cir.nii.ac.jp/crid/1010000781779746447,