- 【Updated on November 17, 2025】 Integration of CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- 【Updated on November 26, 2025】Regarding the recording of “Research Data” and “Evidence Data”
- CiNii Research researchers search function has been released.
- Regarding the suspension of updates to the "BOOK" database data
A High-Aspect Ratio Silicon Gate Formation Technique for Beam-Channel MOS Transistor with Impurity-Enhanced Oxidation
Bibliographic Information
- Title
- A High-Aspect Ratio Silicon Gate Formation Technique for Beam-Channel MOS Transistor with Impurity-Enhanced Oxidation
- Author
- A.Katakami
Journal
-
- Jpn.J.Appl.Phys. 43-4B
-
Jpn.J.Appl.Phys. 43-4B 2145-2150, 2004
- Tweet
Details 詳細情報について
-
- CRID
- 1010000781779746449
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN