著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Substrate Dependence of Crystallization of Silicon Films Prepared by Hydrogen Radical CVD Method,"Proc.29^<th> IEEE Photovoltaic Specialists Conference (New Orleans, May 2002)",,,2002,,,1270-1273,https://cir.nii.ac.jp/crid/1010000781790470785,