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Slot-Excited Surface Wave Plasma for Giant Scale Processing
Bibliographic Information
- Title
- Slot-Excited Surface Wave Plasma for Giant Scale Processing
- Author
- H.Sugai, Y.Nojiri, T.Ishijima, H.Toyoda
Journal
-
- Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing
-
Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 17-18, 2006
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Details 詳細情報について
-
- CRID
- 1010000781801248645
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN