Lifetime improvement of nitrided carbon stripper foils by ion-beam sputtering with a binary gas mixture

Bibliographic Information

Title
Lifetime improvement of nitrided carbon stripper foils by ion-beam sputtering with a binary gas mixture
Author
I.Sugai, Y.Takeda, M.Oyaizu
Published
2004
Resource Type
journal article

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Details 詳細情報について

  • CRID
    1010000781804544268
  • Article Type
    journal article
  • Data Source
    • KAKEN

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