Amorphous fluorocarb on polymer (a-C : F) films prepared in perfluorooctane (C_8F_<18>) vapor Plasmas

Bibliographic Information

Title
Amorphous fluorocarb on polymer (a-C : F) films prepared in perfluorooctane (C_8F_<18>) vapor Plasmas
Author
C.Biloiu, I.A.Biloiu, Y.Sakai, A.Ohta, Y.Suda

Journal

Related Projects

See more

Details 詳細情報について

  • CRID
    1010000781805324686
  • Article Type
    journal article
  • Data Source
    • KAKEN

Report a problem

Back to top