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FABRICATION AND CHARACTERIZATION OF A PIXEL LEVER MICRO VACUUM PACKAGE FOR INFARED IMAGER

  • SAWADA Kazuaki
    Toyohashi University of Technology, Faculty of Engineering, Associate Professor
  • ISHIDA Makoto
    Toyohashi University of Technology, Faculty of Engineering, Professor

Bibliographic Information

Title
FABRICATION AND CHARACTERIZATION OF A PIXEL LEVER MICRO VACUUM PACKAGE FOR INFARED IMAGER
Author
Kimiya Ikushima, Asako Baba, Masanori Kyogoku, Kazuaki Sawada, Makoto Ishida

Journal

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Details

  • CRID
    1010000781805416587
  • Article Type
    journal article
  • Data Source
    • KAKEN

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