Planar metal-insulator-semiconductor type field emitter fabricated on an epitaxial Al/Al_2O_3/Si(111) structure
書誌事項
- タイトル
- Planar metal-insulator-semiconductor type field emitter fabricated on an epitaxial Al/Al_2O_3/Si(111) structure
- 著者
- J.S.Kim, T.Hoshi, K.Sawada, M.Ishida
収録刊行物
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- Journal of Vacuum Science & Technology B 22(3)
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Journal of Vacuum Science & Technology B 22(3) 1358-1361, 2004