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Fabrication of Epitaxial PZT/Pt/_Y-Al_2O_3/Si Structure and its Ferroelectric Characterisics
Bibliographic Information
- Title
- Fabrication of Epitaxial PZT/Pt/_Y-Al_2O_3/Si Structure and its Ferroelectric Characterisics
- Author
- D.Akai, K.Sawada, M.Ishida et al.
Journal
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- 2004 MRS Fall Meeting, Boston, MA, USA
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2004 MRS Fall Meeting, Boston, MA, USA 2004
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Details 詳細情報について
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- CRID
- 1010000781805416712
-
- Article Type
- journal article
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- Data Source
-
- KAKEN