著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited),26th Int.Conf.on Phenomena in Ionized Gases,,,2003,,,137-138,https://cir.nii.ac.jp/crid/1010000781812279683,