Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited)
書誌事項
- タイトル
- Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited)
- 著者
- H.Toyoda
収録刊行物
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- 26th Int.Conf.on Phenomena in Ionized Gases
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26th Int.Conf.on Phenomena in Ionized Gases 137-138, 2003
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詳細情報
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- CRID
- 1010000781812279683
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- 資料種別
- journal article
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- データソース種別
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- KAKEN