A Study on Surface Integrity ofSiC/Si Hybrid Nano-Structured Surfaces
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- 古川 勇二
- 東京農工大学
書誌事項
- タイトル
- A Study on Surface Integrity ofSiC/Si Hybrid Nano-Structured Surfaces
- 著者
- Kenichiro CHUMA, Yuji FURUKAWA, Yujie HAN, Akira KAKUTA
収録刊行物
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- Int. Conf. on Leading Edge Manufacturing in 21^<St> century Vol. 1
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Int. Conf. on Leading Edge Manufacturing in 21^<St> century Vol. 1 1199-1204, 2005