[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

A Study on Surface Integrity ofSiC/Si Hybrid Nano-Structured Surfaces

  • FURUKAWA Yuji
    Tokyo University of Agriculture and Technology, Graduate School of Technology Management, Professor

Bibliographic Information

Title
A Study on Surface Integrity ofSiC/Si Hybrid Nano-Structured Surfaces
Author
Kenichiro CHUMA, Yuji FURUKAWA, Yujie HAN, Akira KAKUTA

Journal

Related Projects

See more

Details

  • CRID
    1010000781870634368
  • Article Type
    journal article
  • Data Source
    • KAKEN

Report a problem

Back to top