著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) 古川 勇二,A Study on Surface Integrity ofSiC/Si Hybrid Nano-Structured Surfaces,Int. Conf. on Leading Edge Manufacturing in 21^ century Vol. 1,,,2005,,,1199-1204,https://cir.nii.ac.jp/crid/1010000781870634368,