Mechanical properties of single crystal Silicon Carbonate thin layer grown by Molecular Beam Epitaxy
書誌事項
- タイトル
- Mechanical properties of single crystal Silicon Carbonate thin layer grown by Molecular Beam Epitaxy
- 著者
- M.Kojima, N.Moronuki, A.Kakuta
収録刊行物
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- Proc.Jap.Soc.Prec.Eng.2005(Autumn)
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Proc.Jap.Soc.Prec.Eng.2005(Autumn) 107-108, 2005