Polymer Adsorption Effects on Stabilities and Chemical Mechanical Polishing Properties of Ceria Particles

Bibliographic Information

Title
Polymer Adsorption Effects on Stabilities and Chemical Mechanical Polishing Properties of Ceria Particles
Author
Norifumi Shimono, Naoyuki Koyama, Masami Kawaguchi

Journal

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Details 詳細情報について

  • CRID
    1010000781873863471
  • Article Type
    journal article
  • Data Source
    • KAKEN

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