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Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field
Bibliographic Information
- Title
- Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field
- Author
- H.Fujiyama, H.Uchida, Y.Nitta, T.Nakatani
- Published
- 2005
- Resource Type
- journal article
Journal
-
- Proc.of the Fourth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology
-
Proc.of the Fourth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology 57-60, 2005
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Details 詳細情報について
-
- CRID
- 1010000781874289160
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
