{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1010000781874289160.json","@type":"Article","resourceType":"学術雑誌論文(journal article)","dc:title":[{"@language":"ja","@value":"Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field"}],"publication":{"prism:publicationName":[{"@language":"ja","@value":"Proc.of the Fourth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology"}],"prism:publicationDate":"2005","prism:startingPage":"57","prism:endingPage":"60"},"project":[{"@id":"https://cir.nii.ac.jp/crid/1040000781874289024","@type":"Project","projectIdentifier":[{"@type":"KAKEN","@value":"16340184"},{"@type":"JGN","@value":"JP16340184"},{"@type":"URI","@value":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16340184/"}],"notation":[{"@language":"ja","@value":"ハーモニックECRプラズマによる極細管内壁コーティング法の研究"},{"@language":"en","@value":"Study on Narrow Tube Inner Coating Method by Harmonic ECR Plasma"}]}],"dataSourceIdentifier":[{"@type":"KAKEN","@value":"PRODUCT-18688339"}]}