Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field
書誌事項
- タイトル
- Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field
- 著者
- H.Fujiyama, H.Uchida, Y.Nitta, T.Nakatani
- 公開日
- 2005
- 資源種別
- journal article
収録刊行物
-
- Proc.of the Fourth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology
-
Proc.of the Fourth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology 57-60, 2005
