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Control of Abnormal Edge Growth in Selective Area MOVPE of InP
Bibliographic Information
- Title
- Control of Abnormal Edge Growth in Selective Area MOVPE of InP
- Author
- M.Sugiyama, N.Waki, Y.Nobumori, H.Song, T.Nakano, T.Arakawa, Y.Nakano, Y.Shimogaki
- Published
- 2005
- Resource Type
- journal article
Journal
-
- 2005 Abstract Book of 12th US Biennial Workshop on Organometallic Vaper Phase Epitaxy (OMVPE 12)
-
2005 Abstract Book of 12th US Biennial Workshop on Organometallic Vaper Phase Epitaxy (OMVPE 12) 173-174, 2005
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Details 詳細情報について
-
- CRID
- 1010000781874610820
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
