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Effects of Al contents microstructures of Cr_<1-X>Al_XN and Zr_<1-X>Al_XN films synthesized by cathodic arc method
Bibliographic Information
- Title
- Effects of Al contents microstructures of Cr_<1-X>Al_XN and Zr_<1-X>Al_XN films synthesized by cathodic arc method
- Author
- Hiroyuki Hasegawa et al.
- Published
- 2005
- Resource Type
- journal article
Journal
-
- Surface & Coatings Technology (印刷中)
-
Surface & Coatings Technology (印刷中) 2005
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Details 詳細情報について
-
- CRID
- 1010000781875345291
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
