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Performance of Inductively Coupled Plasma Source with an External Coil for Sputtering of Titanium Oxide
Bibliographic Information
- Title
- Performance of Inductively Coupled Plasma Source with an External Coil for Sputtering of Titanium Oxide
- Author
- Ken Okumura
- Published
- 2005
- Resource Type
- journal article
Journal
-
- Proceedings of Plasma Science Symposium 2005/The 22^th Symposium on Plasma Processing
-
Proceedings of Plasma Science Symposium 2005/The 22^th Symposium on Plasma Processing 387-388, 2005
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Details 詳細情報について
-
- CRID
- 1010000781881963652
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
