Highly Oriented Growth of Sb-doped SnO_2 Films on A1_2O_3 substrate in ICP-Assisted Reactive Sputtering

Bibliographic Information

Title
Highly Oriented Growth of Sb-doped SnO_2 Films on A1_2O_3 substrate in ICP-Assisted Reactive Sputtering
Author
T.Sugimoto, K.Okimura
Published
2006
Resource Type
journal article

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Details 詳細情報について

  • CRID
    1010000781881963663
  • Article Type
    journal article
  • Data Source
    • KAKEN

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