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Highly Oriented Growth of Sb-doped SnO_2 Films on A1_2O_3 substrate in ICP-Assisted Reactive Sputtering
Bibliographic Information
- Title
- Highly Oriented Growth of Sb-doped SnO_2 Films on A1_2O_3 substrate in ICP-Assisted Reactive Sputtering
- Author
- T.Sugimoto, K.Okimura
- Published
- 2006
- Resource Type
- journal article
Journal
-
- Proceedings of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing
-
Proceedings of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing 661-662, 2006
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Details 詳細情報について
-
- CRID
- 1010000781881963663
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN

