Effect of Oxygen Radical Irradiation of Bi_4Ti_3O_<12> Thin Films by Two-Dimensional RF Magnetron Sputtering

Bibliographic Information

Title
Effect of Oxygen Radical Irradiation of Bi_4Ti_3O_<12> Thin Films by Two-Dimensional RF Magnetron Sputtering
Author
N.Inada, T.Higuchi, H.Masaya, H.Ogawa, M.Iwasa, T.Hattori, T.Tsukamoto

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Details 詳細情報について

  • CRID
    1010000781882252040
  • Article Type
    journal article
  • Data Source
    • KAKEN

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