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Suppression of substrate heating in the sputter-deposition of ITO films.
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- HOSHI Yoichi
- Tokyo Polytechnic University, Faculty of Engineering, Professor
Bibliographic Information
- Title
- Suppression of substrate heating in the sputter-deposition of ITO films.
- Author
- Kentaro Funatsu, Hiro-omi Kato, Yoichi Hoshi
Journal
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- Electrochemistry 72,N.6
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Electrochemistry 72,N.6 418-420, 2004
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Details 詳細情報について
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- CRID
- 1010000781882609025
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- Article Type
- journal article
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- Data Source
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- KAKEN