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High resolution LAPS using amorphous silicon as the semiconductor material
Bibliographic Information
- Title
- High resolution LAPS using amorphous silicon as the semiconductor material
- Author
- Werner Moritz et al.
- Published
- 2004
- Resource Type
- journal article
Journal
-
- Sensors and Actuators B Volume 103, Issues 1-2
-
Sensors and Actuators B Volume 103, Issues 1-2 436-441, 2004
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Details 詳細情報について
-
- CRID
- 1010000781887453699
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
