High resolution LAPS using amorphous silicon as the semiconductor material
書誌事項
- タイトル
- High resolution LAPS using amorphous silicon as the semiconductor material
- 著者
- Werner Moritz et al.
- 公開日
- 2004
- 資源種別
- journal article
収録刊行物
-
- Sensors and Actuators B Volume 103, Issues 1-2
-
Sensors and Actuators B Volume 103, Issues 1-2 436-441, 2004
