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Control Performance of Interactions between Reactive Plasma Jet and the Substrate
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- NISHIYAMA Hideya
- Tohoku University
Bibliographic Information
- Title
- Control Performance of Interactions between Reactive Plasma Jet and the Substrate
- Author
- Hideya Nishiyama
- Published
- 2006
- Resource Type
- journal article
Journal
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- Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing
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Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 173-174, 2006
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Details 詳細情報について
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- CRID
- 1010000781930225672
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
