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パルス通電加熱したTi-Ni粉末焼結ターゲットならびにNaC1粉末焼結基板を用いたスパッ夕成膜

Bibliographic Information

Title
パルス通電加熱したTi-Ni粉末焼結ターゲットならびにNaC1粉末焼結基板を用いたスパッ夕成膜
Author
小林慶三, 尾崎公洋, 三上祐史, 石川幸雄

Journal

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Details

  • CRID
    1010000781933886369
  • Article Type
    journal article
  • Data Source
    • KAKEN

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