Microstructural characterization of 3C-SiC wafer for device application

Bibliographic Information

Title
Microstructural characterization of 3C-SiC wafer for device application
Author
N.Tarumi, K.Watanabe, T.Kokubo, S.Arai, K.Sasaki, K.Kuroda
Published
2007
Resource Type
journal article

Journal

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Details 詳細情報について

  • CRID
    1010000781934008202
  • Article Type
    journal article
  • Data Source
    • KAKEN

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