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Microstructural characterization of 3C-SiC wafer for device application
Bibliographic Information
- Title
- Microstructural characterization of 3C-SiC wafer for device application
- Author
- N.Tarumi, K.Watanabe, T.Kokubo, S.Arai, K.Sasaki, K.Kuroda
- Published
- 2007
- Resource Type
- journal article
Journal
-
- Abstracts of Spring Meeting of Japan Institute of Metals
-
Abstracts of Spring Meeting of Japan Institute of Metals 397-, 2007
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Details 詳細情報について
-
- CRID
- 1010000781934008202
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
