Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays,
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- MAKIMURA Tetsuya
- University of Tsukuba
Bibliographic Information
- Title
- Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays,
- Author
- Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino and Kouichi Murakami
Journal
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- Journal of Physics : Conference Series, refreed 59
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Journal of Physics : Conference Series, refreed 59 279-284, 2007
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Details
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- CRID
- 1010000781934039426
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- Article Type
- journal article
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- Data Source
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- KAKEN
