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Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays,
Bibliographic Information
- Title
- Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays,
- Author
- S. Uchida, T. Makimura, H. Miyamoto, K. Murakami
Journal
-
- Materials Processing for Properties and Per-formance, unrefreed 4
-
Materials Processing for Properties and Per-formance, unrefreed 4 261-263, 2005
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Details 詳細情報について
-
- CRID
- 1010000781934039441
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN