Mass Spectrometric Investigation of Perfluorocarbon Macromolecules in the Downstream Region of Ar/CF_4 Plasmas and the Formation Mechanisms of Large Positive Ions

Bibliographic Information

Title
Mass Spectrometric Investigation of Perfluorocarbon Macromolecules in the Downstream Region of Ar/CF_4 Plasmas and the Formation Mechanisms of Large Positive Ions
Author
Kenji Furuya et al.
Published
2006
Resource Type
journal article

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Details 詳細情報について

  • CRID
    1010000781940533888
  • Article Type
    journal article
  • Data Source
    • KAKEN

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