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Mass Spectrometric Investigation of Perfluorocarbon Macromolecules in the Downstream Region of Ar/CF_4 Plasmas and the Formation Mechanisms of Large Positive Ions
Bibliographic Information
- Title
- Mass Spectrometric Investigation of Perfluorocarbon Macromolecules in the Downstream Region of Ar/CF_4 Plasmas and the Formation Mechanisms of Large Positive Ions
- Author
- Kenji Furuya et al.
- Published
- 2006
- Resource Type
- journal article
Journal
-
- 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP-6/SPP-23) Proceedings 2006
-
6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP-6/SPP-23) Proceedings 2006 391-392, 2006
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Details 詳細情報について
-
- CRID
- 1010000781940533888
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN