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Characterization of orientation- dependent etching properties of quartz : Application to 3-D micromachining simulation system
Bibliographic Information
- Title
- Characterization of orientation- dependent etching properties of quartz : Application to 3-D micromachining simulation system
- Author
- D.Cheng, K.Sato, M.Shikida, A Ono, K.Sato, K.Asaumi, Y.Iriye
- Published
- 2005
- Resource Type
- journal article
Journal
-
- Sensors and Materials vol.17,no.4
-
Sensors and Materials vol.17,no.4 179-186, 2005
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Details 詳細情報について
-
- CRID
- 1010000781946517636
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
