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Cross-sectional TEM observations of Si wafers irradiated with gas cluster ion beams
Bibliographic Information
- Title
- Cross-sectional TEM observations of Si wafers irradiated with gas cluster ion beams
- Author
- H.Isogai, E.Toyoda, T.Senda, K.Izunome, K.Kashima, N.Toyoda, I.Yamada
- Published
- 2006
- Resource Type
- journal article
Journal
-
- Proc. of 16th Int. Conf. on Ion Implantation Technology Marseille, France, 2006
-
Proc. of 16th Int. Conf. on Ion Implantation Technology Marseille, France, 2006 194-197, 2006
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Details 詳細情報について
-
- CRID
- 1010000781951146498
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
