Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
YU Qiang,Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process,Journal of Micromechanics and Microengineering 16・-,,,2007,,,1189-1194,https://cir.nii.ac.jp/crid/1010000781978377617,