著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
于 強,Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process,Journal of Micromechanics and Microengineering 16・-,,,2007,,,1189-1194,https://cir.nii.ac.jp/crid/1010000781978377617,