著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Resistivity reduction of Cu interconnects,"Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945",,,2007,,,1-10,https://cir.nii.ac.jp/crid/1010000781978587906,