Simultaneous formation of n-and p-type ohmic contacts to 4H-SiC using the binary Ni/Al system
書誌事項
- タイトル
- Simultaneous formation of n-and p-type ohmic contacts to 4H-SiC using the binary Ni/Al system
- 著者
- K. Ito, T. Onishi, H. Takeda, S. Tsukimoto, M. Konno, Y. Suzuki and M. Murakami
収録刊行物
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- MRS Proceedings (in press)
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MRS Proceedings (in press) 2008
